Wafers can be inspected for large, obvious defects, or for small, subtle ones. The former is referred to as macro-inspection, while the latter is micro-inspection. These processes use different ...

E-beam inspection tool supplier Hermes Microvision (HMI) has begun shipping its eScan 500-series inspection tools for 1Xnm processes, which help ramp up its revenues in 2014, according to industry ...

Leveraging developments in microfabrication open new possibilities for optical manipulation. With the structural design freedom from three-dimensional printing capabilities of two-photon ...

SAN JOSE — Moving to boost yields in advanced IC production, KLA-Tencor Inc. today (June 11) unveiled its latest electron-beam inspection tool for “electrical line monitoring” applications. The eS30 e ...